Stability

/ Utilize Infini∞A EQ, support all EDA services and functions

/ Ensure performance and stability

Standardization

/ Improve efficiency by standardizing data collection system and interface

/ Unification of Client – Server Interface System

/ Session management, metadata creation, DCP management

Integration

/ Integrated distributed data collection system into EDA Interface

/ Complete facility analysis system construction

/ Integration of additional sensor data such as RGA, OES, Laser

/ Standardization of back-end equipment, utility data, etc.

Monitoring

/ Monitor extended Fab (Server) performance monitoring

/ Centralized management of metadata modeling information