SEMI EDA Standard Compliance Solution
SEMI EDA STANDARD
What is EDA Standard?
With the continuous advancement of semiconductor manufacturing technology and increasing complexity in equipment design and processes, the need for high-quality data (manufacturing big data) for equipment analysis has become essential.
Since the early 2000s, the SEMI Global Information & Control Technical Committee has developed a dedicated protocol for reliable equipment data analysis, independent of the SECS/GEM* protocol, by establishing a separate data channel for high-volume, high-frequency data. This protocol was named the EDA (Equipment Data Acquisition) Standard.
The EDA Standard has evolved through Freeze.1 in 2005 and Freeze.2 in 2010, with the development of Freeze.3 currently on the horizon.
Notably, EDA not only facilitates high-volume, high-frequency equipment data collection but also serves as a data service platform utilizing multi-session and multi-client web service technologies, enabling a new data ecosystem for diverse analytical applications.
*SECS/GEM: A semiconductor standard communication protocol designed for equipment control (Semiconductor Equipment Communication Standard & Generic Equipment Model).
SEMI EDA Freeze.2
SEMI EDA Freeze.2
| Feature | SECS/GEM | EDA |
|---|---|---|
| Data Rates | 10 variables per Chamber 300 values/sec |
50 variables per Chamber 5000 values/sec |
| Event Data | Process Event | Process Event Physical, Mechanical Event |
| Self-Describing | Only Data ID | Equipment structure described as data |
| Secure Communications | Only Equipment Host | Security through Admin e-Diagnostic |
| Configuration | Socket | HTTP (SOAP XML) |
ANTICIPATED EFFECTS
EDA Client = Data Service Platform
We enable a real-time data pipeline that quickly and efficiently transforms data collected from manufacturing sites into context-based datasets tailored to the needs of analytical systems.
ANTICIPATED EFFECTS
EDA Client = Data Service Platform
We enable a real-time data pipeline that quickly and efficiently transforms data collected from manufacturing sites into context-based datasets tailored to the needs of analytical systems.
Flexible data collection
Flexible Data Collection
Flexible data collection enabled through Data Channel separation.
Standardize equipment reference information
Standardization of Equipment Reference Information
Consistent data utilization across various analytical systems is enabled through integrated management of equipment reference information based on EDA.
Acquisition of more high-quality data
Acquisition of More High-Quality Data
The specification and management of required data become more efficient, enabling the acquisition of more high-quality data.
Improve the accuracy of analytical results
Improvement in the Accuracy of Analytical Results
By eliminating data dependencies between existing analytical systems, the smooth supply of required data becomes possible, leading to more accurate analytical results.
Manufacturing Big Data Platform
HIGHLIGHTS
Plug and Play Data Service
We enable a real-time data pipeline that efficiently transforms data collected from manufacturing sites into context-based datasets tailored to the requirements of analytical systems.
- Support for integrating various industry-standard interfaces
- Legacy interface integration support
- Improved reliability of source data
- Reduced development time and cost for data collection and preprocessing
- Establishment of an efficient big data analytics foundation
ARCHITECTURE
Plug and Play Data Service Platform
ARCHITECTURE
Plug and Play Data Service Platform
ROADMAP OF MANUFACTURING BIGDATA APPLICATIONS
Accelerate Equipment Evolution
ROADMAP OF MANUFACTURING BIGDATA APPLICATIONS
Accelerate Equipment Evolution
BIG DATA UTILIZATION
Completion of A.I Driven Equipment Evolution
BIG DATA UTILIZATION
Completion of A.I Driven Equipment Evolution
Accelerate Your AI Projects
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Benefits of EDA Utilization
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Benefits of EDA Utilization
Cost Minimization
Equipment equipped with an EDA server requires no additional development investment for data collection.
Minimized Deployment Time
By utilizing Doople's ready-to-use EDA Host products, a data collection and real-time processing environment can be established with just Session and DCP setup.
Utilization of Verified Data
EDA-supported equipment can fully benefit from the quality of data validated through on-site process verification.
Flexible data collection
EDA-supported equipment can fully benefit from the quality of data validated through on-site process verification.
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All Done in a single Machine
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All Done in a single Machine
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All Done in a Single Day
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All Done in a Single Day
- 1000+ Parameters
- 1000+ Events
- All Exception
- EDA Data Source Configuration
- Definition of Virtual Parameters / Events
- Data Classification and Filter Settings
- Configuration of Data Context, Alias, and Dataset Packaging
- Target Value, LSL, USL Patterns for 150 Parameters
- Anomoly Detection Conditions
No-Code
Configure data collection, processing workflow and analysis WITHOUT DEVELOPMENT
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Feed into your projects
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Feed into your projects
Dataset Notifications
Equal=A Data Processor notifies dataset information through Redis once a dataset is created. To receive real-time dataset creation notifications, use the Redis subscription information defined in the Data Process Workflow.
Search APls
We provide a series of APIs that allow you to search for fingerprint data based on context conditions such as time period, RecipeID, LotID, and Wafer No. These APIs can be easily integrated into custom-built analytical systems.
Analysis Result Notifications
You can receive notifications immediately upon the generation of dataset analysis results. These results can be utilized for creating custom dashboards or for real-time interlocks and other follow-up actions.
Download APls
The retrieved fingerprint data is generated in various sizes depending on the process length, and the size of BOB data also varies. The Pattern FDC server manages the fingerprint data and introduces a method to receive encrypted BOB and fingerprint data through the Download API.
PARTNERS
BUSINESS PARTNERS
PARTNERS
We sincerely thank our valued customers for trusting Doople's technology and services.
We will continue to deliver exceptional customer satisfaction through relentless innovation and challenges.
BUSINESS PARTNERS
PARTNERS
We sincerely thank our valued customers for trusting Doople's technology and services. We will continue to deliver exceptional customer satisfaction through relentless innovation and challenges.
