SUB | EDA Server For Subcomponent

|             PRODUCT ARCHITECTURE           |


/ Utilize Infini∞A EQ, support all EDA services and functions
/ Ensure performance and stability


/ Improve efficiency by standardizing data collection system and interface
/ Unification of Client – Server Interface System
/ Session management, metadata creation, DCP management


/ Integrated distributed data collection system into EDA Interface
/ Complete facility analysis system construction
/ Integration of additional sensor data such as RGA, OES, Laser
/ Standardization of back-end equipment, utility data, etc.


/ Monitor extended Fab (Server) performance monitoring
/ Centralized management of metadata modeling information

|                      PRODUCT LINE UP                      |